Analytical Modeling for the Bending Resonant Frequency of Multilayered Microresonators with Variable Cross-Section

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Analytical Modeling for the Bending Resonant Frequency of Multilayered Microresonators with Variable Cross-Section

Multilayered microresonators commonly use sensitive coating or piezoelectric layers for detection of mass and gas. Most of these microresonators have a variable cross-section that complicates the prediction of their fundamental resonant frequency (generally of the bending mode) through conventional analytical models. In this paper, we present an analytical model to estimate the first resonant f...

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ژورنال

عنوان ژورنال: Sensors

سال: 2011

ISSN: 1424-8220

DOI: 10.3390/s110908203